Product Details

LP-900EBA Vacuum Optical Coater

  • Model:LP-900EBA
  • Specification:

Product Introduction

Features:
  • Capable of equipping Ion Source or plasma gun for depositing multi-layer and precise optical coatings.
  • When equipped substrate reverses mechanism, it would greatly reduce the processing time, get higher throughput, and lower production cost per unit.
  • With its hi-performance layer monitoring system and computerized system, it can fulfill precise thickness requirement for optical layer coating
  • Process control system runs on Windows system interface and easy to use
  • Repeatable and reliable coating 
 
Applications:
  1. APS/ DSC / DSLR Camera Lens
  2. PTV/ Liquid Crystal Projector Lens
  3. Dichroic filter/ mirror
  4. IR/ UV cut filter
  5. DVD pick-up head and CCTV Lens
  6. AR coating
System/Model
LP-900 EBA
Chamber Size
Diameter
900 mm
Substrate-Dome
∮820 mm
Main Performance
Ultimate Pressure
Better than 10-6 Torr
Operation Pressure
From 1 atm to 2x10-5 Torr within 30 minutes (unloading)
Substrate Temp
350℃ (Max)
Pumping System
Rotary Pump
3,000 L/min
Booster Pump
600 M3/ hour
Diffusion Pump
20,000 L/ sec x 1
Meissner Trap
Cryogenic Refrigerator (-110 ~ -140℃)
Heating System
Micro Heater
12KW
Layer Monitoring System
Optical Monitor
LP Broad Band Monitor
Crystal Monitor
Single Sensor/ Six-pcs Sensor Head
Vacuum Gauge
Pirani (760 ~10-3 Torr); Cold Cathode (10-3 ~ 10-6 Torr)
Evaporation Source
E-Beam
Plasmatech 6KW/10KW
Thermal
3KW
Rotation System
 
Planetary or Dome
Ion Source
 
Optical
Cooling water flow rate
 
80 L/min
Cooling Tower
 
Water Pressure: 4kg/ cm2; Pressure Drop: 2kg/ cm2
Cooling Water
 
Inlet: 18℃; Outlet: 25℃; Standard: 20±1℃
Polycold
 
Option
Air Compressor
 
3HP (Air Pressure: 6 ~ 8 kg/ cm2)
Grounding Resistance
 
Under 5Ω
Electrical Control System
 
PLC,PC (Windows system)
Total Power Requirement
 
35KW
Environment Requirement
Clean Room(ISO Class 5); Exopy Flooring; Air-conditioning; Temp.25±3℃; HUM50±10%