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System/Model
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LP-1300 BSA
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Chamber Size
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Diameter
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1300mm
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Substrate-Dome
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∮1,200mm
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Main Performance
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Ultimate Pressure
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Better than 10-6 Torr
|
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Operation Pressure
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From 1 atm to 5x10-5 Torr within 10 minutes (unloading)
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Pumping System
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Rotary Pump
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6,000 L/min
|
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Booster Pump
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1,500 M3/ hour
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Diffusion Pump
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45,000 L/ sec x 1
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Meissner Trap
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-110 ~ -140 ℃
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Layer Monitoring System
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Crystal Monitor
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Single Sensor/ Six-pcs Sensor Head
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Vacuum Gauge
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Pirani (760 ~10-3 Torr); Cold Cathode (10-3 ~ 10-6 Torr)
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Evaporation Power Supply
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Thermo
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15KW x12V
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Rotation System
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Planetary or Dome
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Ion Source
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Option
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Cooling water flow rate
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100 L/ min
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Cooling Tower
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15 RT (Water Pressure: 4kg/ cm2; Pressure Drop: 2kg/ cm2)
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Cooling Water
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Inlet: 18℃; Outlet: 25℃; Standard: 20±1℃
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Polycold
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Option
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Air Compressor
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3HP (Air Pressure: 6 ~ 8 kg/ cm2)
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Electrical Control System
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PLC, PC base (Windows System)
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Total Power Requirement
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|
40KW
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