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Titanium oxides
1. Highest refractive index if oxides in visible range
2. AR and multilayer coatings on glass and polymers
3. Best reproducibility by using Ti3O5
4. Stable evaporation behavior without spitting or outgassing
5. High UV-blockage and low thermal substrate load for coating on plastics
Material Characteristics
| Chemical formula |
TiO |
Ti2O3 |
Ti3O5 |
| Color |
Gold |
Purple |
Black-purple |
| Melting point °C |
1750 |
~1760 |
~1760 |
Application fields
AR and multilayer coatings (dielectric mirrors, dichroics, narrowband filters, polarizers, beamsplitters) for VIS and IR spectral range, coating for precision optics and on plastics, to a lesser extent for laser coatings.
Zirconium oxides
1. Very hard and durable films
2. High laser damage resistance
3. High refractive index material for multilayer and AR coatings on glass and plastics
4. ZrO material with higher density and complete melting for easier evaporation
Material Characteristics
| Chemical formula |
ZrO2 |
ZrO |
| Color |
White |
Dark Grey~ Black |
| Melting point °C |
~2700 |
~2200 |
Application fields
AR and multilayer coatings (laser mirror, dichroics, narrowband filters, polarizers, beamsplitters) for DUV (>230nm, excimer lasers), VIS and IR spectral range for precision optics and laser coatings. Use for coatings on plastics, potentially on flexible substrates.
Magnesium oxides
1. Hard and durable films
2. Intermediate refractive index
3. Adhesion promotor
Material Characteristics
| Chemical formula |
MgO |
| Color |
White or glassy transparent |
| Melting point °C |
2640 |
Application fields
AR coatings for precision optics and laser coatings in DUV (>200nm), VIS and IR spectral range. Adhesion promotor.
Aluminium oxides
1. Only high refractive index material for DUV
2. Medium index material for VIS and IR spectral range
3. Good laser damage resistance 193~1064nm
Material Characteristics
| Chemical formula |
Al2O3 |
| Color |
White or glassy transparent |
| Melting point °C |
2046 |
Application fields
AR and multilayer coatings (dielectric mirrors, dichroics, narrowband filters, polarizers, beamsplitters) forDUV (>190nm), VIS and IR spectral range for precision optics and laser coatings. Use for coatings on lithographic equipment(≧193nm) and for coatings on plastics.
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