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System/Model
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LP-1100 HS
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Chamber Size
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Diameter
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1,100 mm
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Height
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1,100 mm
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|
Capacity
|
-
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∮220x1,000mm x 6
|
|
View Windows
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Set
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1
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Number of Filaments
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Pcs
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4
|
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Main Performance
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Ultimate Pressure
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Better than 10-6 Torr
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|
Operation Pressure
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From 1 atm to 2x10-4 Torr within 10 minutes (unloading)
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|
Pumping System
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Rotary Pump
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6000 L/min
|
|
Booster Pump
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1,500 M3/ hour
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|
Diffusion Pump
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20,000 L/ sec
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|
Meissner Trap
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Cryogenic Refrigerator (-110 ~ -140℃)
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|
High Vacuum Valve
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|
24 inch x1
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Roughing Valve
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|
6 inch x1
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Foreline Valve
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|
6 inch x1
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Leak Valve
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|
2 inch x1
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System Operation
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|
Automatic/ Manual
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Evaporation Power Supply
|
|
10KW
|
|
Vacuum Gauge
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|
Pirani (760 ~10-3 Torr) Cold Cathode (10-3 ~ 10-6 Torr)
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Control Box
|
set
|
1
|
|
Cooling Tower
|
|
15 RT (Water Pressure: 4kg/ cm2; Pressure Drop: 2kg/ cm2)
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|
Cooling Water
|
|
Inlet: 18℃; Outlet: 25℃; Standard: 20±1℃
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Polycold
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Option
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|
Air Compressor
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3HP (Air Pressure: 6 ~ 8 kg/ cm2)
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|
Total Power Requirement
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|
40KW
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