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System/Model
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LP- 1500 BSPD
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Chamber Size
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Diameter
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1,500 mm
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Height
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1,500 mm
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|
Capacity
|
-
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∮135x1,250 x24
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Main Performance
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Ultimate Pressure
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Better than 10-6 Torr
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|
Operation Pressure
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From 1 atm to 5x10-5 Torr within 10 minutes (unloading)
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|
View Windows
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Set
|
1
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Number of Filaments
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Pcs
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20~24
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|
Pumping System
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Rotary Pump
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6,000~10,000 L/min
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|
Booster Pump
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2,000~5,000 M3/ hour
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|
Diffusion Pump
|
45000 L/ sec
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|
Holding Pump
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300~600 L/min (Optional)
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|
Meissner Trap
|
-110 ~ -140 ℃
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Vacuum Gauge
|
|
Pirani (760 ~10-3 Torr); Cold Cathode (10-3 ~ 10-6 Torr)
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|
Control Box
|
Set
|
1
|
|
Evaporation Power Supply
|
|
35KW
|
|
Sputtering Target
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Pcs
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2~4
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|
Evaporation Power Supply
|
|
RF or DC
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|
System Operation
|
|
Automatic/ Manual
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|
Cooling water flow rate
|
|
100 L/min
|
|
High Vacuum Valve
|
|
36 inch
|
|
Roughing Valve
|
|
6 inch
|
|
Foreline Valve
|
|
6 inch
|
|
Leak Valve
|
|
2 inch
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|
Holding Valve (option)
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|
1 inch
|
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Cooling Tower
|
|
15 RT (Water Pressure: 4kg/ cm2; Pressure Drop: 2kg/ cm2)
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|
Cooling Water
|
|
Inlet: 18℃; Outlet: 25℃; Standard: 20±1℃
|
|
Polycold
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Option
|
|
Air Compressor
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|
3HP (Air Pressure: 6 ~ 8 kg/ cm2)
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Electrical Control System
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|
PLC
|
|
Total Power Requirement
|
|
85KW
|
|
Environment Requirement
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Clean Room(ISO Class 5); Exopy Flooring; Air-conditioning; Temp.25±3℃; HUM50±10%
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