|
System/Model
|
LP-1100 BSA
|
|
Chamber Size
|
Diameter
|
1100mm
|
|
Substrate-Dome
|
∮950mm
|
|
Main Performance
|
Ultimate Pressure
|
Better than 10-6 Torr
|
|
Operation Pressure
|
From 1 atm to 5x10-5 Torr within 10 minutes (unloading)
|
|
Pumping System
|
Rotary Pump
|
3,000 L/min
|
|
Booster Pump
|
600 M3/ hour
|
|
Diffusion Pump
|
20,000 L/ sec x 1
|
|
Meissner Trap
|
-110 ~ -140 ℃
|
|
Layer Monitoring System
|
Crystal Monitor
|
Single Sensor/ Six-pcs Sensor Head
|
|
Vacuum Gauge
|
|
Pirani (760 ~10-3 Torr); Cold Cathode (10-3 ~ 10-6 Torr)
|
|
Evaporation Power Supply
|
Thermo
|
10KW x12V
|
|
Rotation System
|
|
Planetary or Dome
|
|
Ion Source
|
|
Option
|
|
Cooling water flow rate
|
|
80 L/ min
|
|
Cooling Tower
|
|
15 RT (Water Pressure: 4kg/ cm2; Pressure Drop: 2kg/ cm2)
|
|
Cooling Water
|
|
Inlet: 18℃; Outlet: 25℃; Standard: 20±1℃
|
|
Polycold
|
|
Option
|
|
Air Compressor
|
|
3HP (Air Pressure: 6 ~ 8 kg/ cm2)
|
|
Electrical Control System
|
|
PLC, PC base (Windows System)
|
|
Total Power Requirement
|
|
30KW
|