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System/Model
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LP-1500 BSA
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|
Chamber Size
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Diameter
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1500mm
|
|
Substrate-Dome
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∮1,400mm
|
|
Main Performance
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Ultimate Pressure
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Better than 10-6 Torr
|
|
Operation Pressure
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From 1 atm to 5x10-5 Torr within 10 minutes (unloading)
|
|
Pumping System
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Rotary Pump
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10,000 L/min
|
|
Booster Pump
|
3,000 M3/ hour
|
|
Diffusion Pump
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45,000 L/ sec x 1
|
|
Meissner Trap
|
-110 ~ -140 ℃
|
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Layer Monitoring System
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Crystal Monitor
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Single Sensor/ Six-pcs Sensor Head
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|
Vacuum Gauge
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Pirani (760 ~10-3 Torr); Cold Cathode (10-3 ~ 10-6 Torr)
|
|
Evaporation Power Supply
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Thermo
|
15KW x12V
|
|
Rotation System
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|
Planetary or Dome
|
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Ion Source
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|
Option
|
|
Cooling water flow rate
|
|
120 L/ min
|
|
Cooling Tower
|
|
15 RT (Water Pressure: 4kg/ cm2; Pressure Drop: 2kg/ cm2)
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|
Cooling Water
|
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Inlet: 18℃; Outlet: 25℃; Standard: 20±1℃
|
|
Polycold
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Option
|
|
Air Compressor
|
|
3HP (Air Pressure: 6 ~ 8 kg/ cm2)
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Electrical Control System
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|
PLC, PC base (Windows System)
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Total Power Requirement
|
|
50KW
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