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System/Model
|
LP-1300 HS
|
|
Chamber Size
|
Diameter
|
1,300 mm
|
|
Height
|
1,500 mm
|
|
Capacity
|
-
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∮250x1,400mm x 8
|
|
View Windows
|
Set
|
1
|
|
Number of Filaments
|
Pcs
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5
|
|
Main Performance
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Ultimate Pressure
|
Better than 10-6 Torr
|
|
Operation Pressure
|
From 1 atm to 2x10-4 Torr within 10 minutes (unloading)
|
|
Pumping System
|
Rotary Pump
|
6000~10,000 L/min
|
|
Booster Pump
|
2,500 M3/ hour
|
|
Diffusion Pump
|
45,000 L/ sec
|
|
Meissner Trap
|
Cryogenic Refrigerator (-110 ~ -140℃)
|
|
High Vacuum Valve
|
|
36 inch x1
|
|
Roughing Valve
|
|
6 inch x1
|
|
Foreline Valve
|
|
6 inch x1
|
|
Leak Valve
|
|
2 inch x1
|
|
System Operation
|
|
Automatic/ Manual
|
|
Evaporation Power Supply
|
|
30KW
|
|
Vacuum Gauge
|
|
Pirani (760 ~10-3 Torr) Cold Cathode (10-3 ~ 10-6 Torr)
|
|
Control Box
|
set
|
1
|
|
Cooling Tower
|
|
15 RT (Water Pressure: 4kg/ cm2; Pressure Drop: 2kg/ cm2)
|
|
Cooling Water
|
|
Inlet: 18℃; Outlet: 25℃; Standard: 20±1℃
|
|
Polycold
|
|
Option
|
|
Air Compressor
|
|
3HP (Air Pressure: 6 ~ 8 kg/ cm2)
|
|
Total Power Requirement
|
|
50KW
|