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System/Model
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LP- 1200 BSPD
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Chamber Size
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Diameter
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1,200 mm
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Height
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1,300 mm
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Capacity
|
-
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∮135x1,050 x18
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Main Performance
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Ultimate Pressure
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Better than 10-6 Torr
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Operation Pressure
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From 1 atm to 5x10-5 Torr within 10 minutes (unloading)
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View Windows
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Set
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1
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Number of Filaments
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Pcs
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18~22
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Pumping System
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Rotary Pump
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3,000~7,500 L/min
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Booster Pump
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1,200~1,500 M3/ hour
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Diffusion Pump
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20000 L/ sec
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Holding Pump
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300~600 L/min (Optional)
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Meissner Trap
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-110 ~ -140 ℃
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Vacuum Gauge
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Pirani (760 ~10-3 Torr); Cold Cathode (10-3 ~ 10-6 Torr)
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Control Box
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Set
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1
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Evaporation Power Supply
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|
30KW
|
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Sputtering Target
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Pcs
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2~4
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Evaporation Power Supply
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RF or DC
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System Operation
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|
Automatic/ Manual
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Cooling water flow rate
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|
80 L/min
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High Vacuum Valve
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|
24 inch
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Roughing Valve
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|
6 inch
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Foreline Valve
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|
6 inch
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Leak Valve
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2 inch
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Holding Valve (option)
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1 inch
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Cooling Tower
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15 RT (Water Pressure: 4kg/ cm2; Pressure Drop: 2kg/ cm2)
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Cooling Water
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Inlet: 18℃; Outlet: 25℃; Standard: 20±1℃
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Polycold
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Option
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Air Compressor
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3HP (Air Pressure: 6 ~ 8 kg/ cm2)
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Electrical Control System
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PLC
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Total Power Requirement
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|
75KW
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Environment Requirement
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Clean Room(ISO Class 5); Exopy Flooring; Air-conditioning; Temp.25±3℃; HUM50±10%
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